Coated targets: domestic development catching up

　　The coating target is a sputtering source that forms various functional films on the substrate by magnetron sputtering, multi arc ion plating or other types of coating systems under appropriate process conditions. Integrated circuit and flat panel display are the main application fields of target materials. Their sputtering products mainly include electrode interconnect film, capacitor electrode film, contact film, optical disc mask, barrier film, resistance film, etc. The main manufacturers of high-end sputtering targets in the world include JX / Nikko, Praxair / MRC, Honeywell electronic materials, TOSOH SMD, etc.

　　The high-purity metal target market for flat panel display is mainly monopolized by Plansee of Austria, H.C. Starck of Germany, Hitachi metal of Japan and Sumitomo of Japan. Among them, Plansee of Austria and shityco of Germany are the world's largest molybdenum target suppliers. Ito high-end targets are monopolized by a few companies such as Japan Mining Co., Ltd., Japan Mitsui Metal Mining Co., Ltd., Japan Dongcao Chemical Co., Ltd. and South Korea SamSung. Japan mining and Mitsui mining almost occupy the whole share of ITO targets for high-end TFT-LCD market and most of the touch screen panel market, with an annual supply of more than 600t.

　　China is a big demand area for thin film sputtering targets in the world, and the domestic target materials are developing rapidly.

　　Domestic enterprises have made slow progress in independent research and development of indium tin oxide (ITO) target technology, which is mainly supplied to the low-end market due to technical constraints; Almost all ITO targets for high-end TFT-LCD and touch screen are imported from Japan and South Korea. In recent years, domestic enterprises have accelerated the technology R & D and introduction of ITO targets, and many high-end ITO target localization projects are under construction.